Patent · US Expired

Substrate coated with an MgO layer

US6676814B1 · kind B1 · utility

3Cited by

1References

80Claims

0Family size

Assignee

Unaxis Trading Ltd · CH

Inventors

Johannes Stollenwerk · Gelnhausen, DE
Christoph Daube · Alzenau, DE
Achim Gurke · Aschaffenburg, DE

Key dates

Filing date	Oct 13, 2000
Grant date	Jan 13, 2004
Priority date	—
Expiry date	Oct 13, 2020

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC03C2218/155
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method for manufacturing a display panel substrate has the steps of flowing a working gas along and out of a slit defined between two sputtering targets of Mg and toward the substrate thereby selecting the purity of the Mg material of the targets to be at least 99% and thereby blowing sputtered-off material out of the slit and toward the substrate. Introduction, in an area between the slit and the substrate, of a reactive gas containing oxygen, follows, and reacting the sputtered-off material with the reactive gas results in depositing on the substrate, an MgO layer. The method also includes setting the temperature of the substrate during the coating process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.