Probe contact system having planarity adjustment mechanism
US6677771B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2002 |
| Grant date | Jan 13, 2004 |
| Priority date | — |
| Expiry date | Sep 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07378
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe contact system is capable of adjusting distances between tips of the contactors and contact targets with simple and low cost mechanism. The probe contact system includes a contact substrate having a large number of contactors, a probe card for fixedly mounting the contact substrate for establishing electrical communication between the contactors and a test system, a probe card ring attached to a frame of the probe contact system for mechanically coupling the probe card to the frame, and a plurality of adjustment members for up/down moving the probe card relative to the probe card ring at three or more locations on the probe card. Each of the adjustment members is housed within a through hole formed on the probe card.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.