Robotic storage buffer system for substrate carrier pods
US6678583B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 2, 2002 |
| Grant date | Jan 13, 2004 |
| Priority date | — |
| Expiry date | Aug 3, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67769
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot providing an additional one degree of freedom and a mechanism for grabbing and moving of substrate and/or substrate carriers. The robot is mounted in an inverted orientation to a removable service cart for easy removal of the robot to a service area in the event of breakdown. The robot receives commands from a programmable controller connected to control the robot and configured to direct the arm of the robot through a set of movements. Product is loaded in and out of the system through I/O load ports. Product is stored inside the storage/buffering system on a plurality of storage locations, each with product presence/absence detect sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.