Electrically insulating vacuum coupling
US6683317B1 · kind B1 · utility
6Cited by
2References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2002 |
| Grant date | Jan 27, 2004 |
| Priority date | — |
| Expiry date | Oct 24, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/166
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electrically insulating vacuum coupling for use in an ion implanter for connecting any two parts of the vacuum chamber housing together while maintaining the electrical potentials of the two parts. The coupling comprises an inner sleeve of ceramic material (e.g. Al2O3) and an outer sleeve of a polymer/litharge mixture. The polymer may be a urethane polymer. Litharge is included in the material of the outer sleeve to absorb x-rays produced within the vacuum chamber. The coupling is particularly useful for coupling an ion source to the main housing of the vacuum chamber
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.