Capacitive displacement sensor
US6683780B2 · kind B2 · utility
12Cited by
6References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2002 |
| Grant date | Jan 27, 2004 |
| Priority date | — |
| Expiry date | Sep 20, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/2415
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A displacement responsive device e.g. a measurement probe (110) is disclosed. Displacement of a stylus (130) causes resilient movement of a carriage (134) supported by planar springs (112) and (114). This movement is detected by a capacitance sensor (160), formed from two cylinders (164) and (166). The cylinders move in at least three degrees of freedom and changes in their capacitance during the said movement can be determined by a circuit (e.g. FIG. 5). Movement in x, y and z directions can be sensed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.