Patent · US Expired

Optical coupling structures and the fabrication processes

US6684007B2 · kind B2 · utility

186Cited by
100References
4Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 9, 2001
Grant dateJan 27, 2004
Priority date
Expiry dateMar 15, 2022

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K1/14
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An optical apparatus including an optical substrate having an embedded waveguide and an optical device adapted to receive light transmitted from an end of the waveguide. The optical apparatus includes a coupling structure for coupling the optical device to the substrate. The coupling structure has a thin metallic layer with an aperture. At least a portion of the optical device is disposed in the aperture. A method for making an optical apparatus comprising forming an optical substrate having a waveguide embedded therein; depositing a metal layer over an end of the waveguide; and depositing a polymeric layer over the metal layer. An aperture is formed in the metal layer and in the polymeric layer by removing a portion of the metal layer and a portion of the polymeric layer disposed over the end of the waveguide. The method for making an optical apparatus also comprises inserting at least a portion of an optical device within the aperture so that the optical device is positioned to receive light from the first end of the waveguide.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.