Fused silica pellicle
US6686103B2 · kind B2 · utility
1Cited by
36References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 18, 2002 |
| Grant date | Feb 3, 2004 |
| Priority date | — |
| Expiry date | Dec 18, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fused silica pellicle for use on photomasks having increased durability and improved transmission uniformity and birefringence properties. The pellicle may be secured to the photomask using an adhesive or a slide rail system, or may be held in place using a static charge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.