Multifunctional polymeric materials and use thereof
US6686124B1 · kind B1 · utility
32Cited by
7References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2000 |
| Grant date | Feb 3, 2004 |
| Priority date | — |
| Expiry date | Mar 14, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03C1/733
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A multifunctional polymer comprising a polymeric chain having chromophore groups and cross-linking sites is suitable as a resist material and especially as the underlayer for bilayer and top surface imaging strategies. The multifunctional polymer can function as an antireflective coating, planarizing layer or etch resistant hard mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.