Patent · US Expired

Vertical replacement-gate junction field-effect transistor

US6690040B2 · kind B2 · utility

28Cited by
20References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 10, 2001
Grant dateFeb 10, 2004
Priority date
Expiry dateSep 10, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/87

Abstract

A vertical JFET architecture. Generally, an integrated circuit structure includes a semiconductor area with a major surface formed along a plane and a first source/drain doped region formed in the surface. A second doped region forming a channel of different conductivity type than the first region is disposed over the first region. A third doped region is formed over the second doped region having an opposite conductivity type with respect to the second doped region, and forming a source/drain region. A gate is formed over the channel to form a vertical JFET.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.