Apparatus for testing reliability of interconnection in integrated circuit
US6690187B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2002 |
| Grant date | Feb 10, 2004 |
| Priority date | — |
| Expiry date | Apr 1, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2853
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In the present invention, an apparatus of testing a leakage protection reliability of an integrated circuit interconnection. The apparatus has at least one comb-like pattern, a serpentine-like pattern and means of applying a bias to the patterns and forms a maximum field region at an interconnection formed around a via, i.e., at the end of a tooth portion composing the comb-like pattern. In one structure of the present invention, the comb-like pattern is formed at one level, and the serpentine-like pattern has a plurality of unit parts corresponding to the tooth portions, respectively, and connection parts connecting the neighboring two unit parts. Each of the unit parts is formed at the same level with the comb-like pattern and spaced apart from the tooth portion by a minimum design length according to a design rule. The unit part has vias formed through an interlayer dielectric layer at the both ends of a tooth parallel part, two tooth parallel parts connected with the vias, respectively, and a length parallel part electrically connecting two tooth parallel parts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.