Rotational speed sensor

US6691571B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rainer Willig · Tamm, DE
• Andreas Thomae · Kirchentellinsfurt, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Joerg Hauer · Reutlingen, DE
• Udo-Martin Gomez · Leonberg, DE
• Siegbert Goetz · Gerlingen, DE
• Christian Doering · Stuttgart, DE
• Michael Fehrenbach · Rehoboth Beach, US
• Wolfram Bauer · Lörrach, DE
• Udo Bischof · Wannweil, DE
• Reinhard Neul · Stuttgart, DE
• Karsten Funk · Stuttgart, DE
• Markus Lutz · Palo Alto, US
• Gerhard Wucher · Reutlingen, DE
• Jochen Franz · Reutlingen, DE

Key dates

• Filing date: May 29, 2003
• Grant date: Feb 17, 2004
• Expiry date: May 29, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.