Method and device for measuring the amplitude of a freely oscillating capillary of a wire bonder
US6691574B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2003 |
| Grant date | Feb 17, 2004 |
| Priority date | — |
| Expiry date | Feb 24, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/12042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
On measurement of a component Ay of the amplitude of the oscillations of the tip of a capillary which is clamped to a horn to which ultrasonics can be applied from an ultrasonic transducer, whereby measurement is based on the shading of a light beam by the capillary and whereby the intensity of the light beam is measured by means of an opto-receiver, the capillary is placed at one side of the light beam without it shading the light beam and ultrasonics is applied to it. The capillary is then moved in steps through the light beam whereby, for each of the i=1 to n steps, the direct voltage portion UDC(yi) and the alternating voltage portion UAC(yi) of the output signal of the opto-receiver are determined as well as a co-ordinate yi whereby the co-ordinate yi designates the position of the capillary in relation to a co-ordinate axis y running perpendicularly to the light beam. The amplitude Ay is then calculated from the values measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.