Microvia inspection system
US6697154B2 · kind B2 · utility
7Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2001 |
| Grant date | Feb 24, 2004 |
| Priority date | — |
| Expiry date | Jan 11, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30141
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system has a projection lens directing on-axis light and low level LEDs directing light to blind microvias. A high resolution camera captures blind microvia images and an image processor recognizes defects according to classifications according to reflected light area and centroid position. The lens is telecentric for particularly effective image capture in blind microvias. The system also has an array of 6000 back lighting LEDs providing illumination for capture of images by a camera. These images are analyzed by the image processor to detect defects such as blocked through microvias.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.