Dual damascene metal trace with reduced RF impedance resulting from the skin effect
US6703710B1 · kind B1 · utility
7Cited by
8References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 15, 2002 |
| Grant date | Mar 9, 2004 |
| Priority date | — |
| Expiry date | Aug 15, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The RF impedance of a metal trace at gigahertz frequencies is reduced by forming the metal trace to have a base region and a number of fingers that extend away from the base region. When formed to have a number of loops, the metal trace forms an inductor with an increased Q.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.