Rotation rate sensor

US6705164B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rainer Willig · Tamm, DE
• Andreas Thomae · Kirchentellinsfurt, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Joerg Hauer · Reutlingen, DE
• Udo-Martin Gomez · Leonberg, DE
• Siegbert Goetz · Gerlingen, DE
• Christian Doering · Stuttgart, DE
• Michael Fehrenbach · Rehoboth Beach, US
• Wolfram Bauer · Lörrach, DE
• Udo Bischof · Wannweil, DE
• Reinhard Neul · Stuttgart, DE
• Karsten Funk · Stuttgart, DE
• Markus Lutz · Palo Alto, US
• Gerhard Wucher · Reutlingen, DE
• Jochen Franz · Reutlingen, DE

Key dates

• Filing date: Mar 19, 2003
• Grant date: Mar 16, 2004
• Expiry date: Mar 19, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.