Patent · US Expired

Measurement of the concentration of a reducing agent in an electroless plating bath

US6709561B1 · kind B1 · utility

18Cited by
2References
28Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 6, 2002
Grant dateMar 23, 2004
Priority date
Expiry dateNov 6, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N27/42
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The concentration of a reducing agent in an electroless bath for plating a first metal is determined from the effect of the reducing agent on the electrodeposition rate of a second metal. For electroless cobalt and nickel baths, a sample of the electroless plating bath is added to an acid copper plating solution and the copper electrodeposition rate is measured by cyclic voltammetric stripping (CVS) analysis. Separate analyses for hypophosphite and dimethylamineborane in baths employing both reducing agents are attained via selective decomposition of the dimethylamineborane in acidic solution.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.