Apparatus and method for testing semiconductor devices
US6709877B2 · kind B2 · utility
13Cited by
4References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 23, 2001 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | May 8, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is disclosed an apparatus for supporting singulated electronic devices during a testing operation, comprising: a main body and a support member, wherein said support member is made of non-conducting high-resistivity material and comprises a plurality of recesses, each said recess being adapted to receive an individual singulated device. There is also disclosed a method for testing such devices in which the devices are carried on support members through a testing process including one or more environmental control chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.