Planar lightwave circuit active device metallization process
US6709882B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 27, 2001 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Aug 27, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for making a resistive heater for a planar lightwave circuit. The method includes the step of depositing a resistive layer on a top clad of a planar lightwave circuit. An interconnect layer is subsequently deposited over the resistive layer. The resistive layer can be tungsten and the interconnect layer can be aluminum. The interconnect layer is then etched to define a heater interconnect, wherein the heater interconnect is disposed over the resistive layer and has a first width. The heater interconnect is then masked, and the resistive layer is etched to define a resistive heater. The resistive heater is disposed beneath the heater interconnect and has a second width larger than the first width. The heater interconnect is defined to include a heater conduct region between a first contact pad and a second contact pad such that a current between the first contact pad and the second contact pad is conducted through the resistive heater, thereby generating heat which is conducted into the top clad of the planar lightwave circuit. The difference between the first width of the heater interconnect and the larger second width of the underlying resistive heater is determined to de…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.