Optically powered resonant integrated microstructure pressure sensor
US6710355B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 7, 2002 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Apr 10, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0079
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor using an optically powered resonant integrated microstructure (O-RIMS). The pressure sensor comprises a planar substrate having a photodiode, a polysilicon shell, a microbeam having a resonant frequency and fastened to the shell, and one or more optical fibers. A fluorescent material, such as erbium, is placed on the surface of the substrate in proximity to the microbeam. A Fabry-Perot cavity is formed comprising the substrate, the microbeam, and the shell. Changes in the vibratory frequency of the microbeam caused by pressure on the shell causes light delivered by a optical fiber to be modulated as the microbeam vibrates. The modulated light is conveyed to a sensor electronics arrangement via the optical fiber. The sensor electronics arrangement determines the pressure surrounding the O-RIMS from the modulated light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.