Inventor · Maple Grove, MN, US

Daniel Youngner

63Patents
13h-index
48Co-inventors
84Inventor score

Filing activity: Jun 20, 1983 → Jan 28, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US5280894A Fixture for backside wafer etching Emerging Cross-Sectional Technologies 315 Expired
US6126140A Monolithic bi-directional microvalve with enclosed drive electric field Mechanical Engineering; Lighting; Heating 66 Expired
US6557419B1 Zero TCF thin film resonator Performing Operations; Transporting 55 Expired
US5959338A Micro electro-mechanical systems relay Electricity 30 Expired
US6378292B1 MEMS microthruster array Performing Operations; Transporting 24 Expired
US5567650A Method of forming tapered plug-filled via in electrical interconnection Emerging Cross-Sectional Technologies 22 Expired
US7189934B2 Self-healing liquid contact switch Electricity 22 Expired
US7944317B2 Cold atom micro primary standard Physics 20 Active
US7145143B2 Tunable sensor Electricity 17 Expired
US6894787B2 Optical pressure sensor Physics 17 Expired
US6031944A High temperature resonant integrated microstructure sensor Physics 16 Expired
US7965147B2 Physics package design for a cold atom primary frequency standard Physics 15 Active
US6710355B2 Optically powered resonant integrated microstructure pressure sensor Physics 14 Expired
US8242851B2 Processes for stabilizing a VCSEL in a chip-scale atomic clock Emerging Cross-Sectional Technologies 13 Active
US7379486B2 Technique for optically pumping alkali-metal atoms using CPT resonances Physics 13 Expired
US7154362B2 Robotic member Electricity 10 Expired
US8299860B2 Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells Emerging Cross-Sectional Technologies 10 Active
US8829893B2 Linear position sensor Physics 9 Active
US6714007B2 Optically powered resonant integrated microstructure magnetic field gradient sensor Physics 9 Expired
US6040749A Apparatus and method for operating a micromechanical switch Electricity 9 Expired
US6534887B1 Microwheel Emerging Cross-Sectional Technologies 8 Expired
US4642162A Planarization of dielectric layers in integrated circuits Electricity 7 Expired
US4445966A Method of plasma etching of films containing chromium Electricity 7 Expired
US8067991B2 Chip-scale atomic clock with two thermal zones Electricity 6 Active
US4679308A Process for controlling mobile ion contamination in semiconductor devices Emerging Cross-Sectional Technologies 6 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.