Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card
US6710798B1 · kind B1 · utility
136Cited by
13References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 1999 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Mar 9, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R35/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card inspection system uses a fiduciary plate having a plurality of targets deposited thereon by photolithography and vapor deposition. A plurality of semiconductor probe card probe tips are contacted with the fiducial pattern on the plate. An electronic imaging system determines the position of geometric centroids of the probe tips with respect to an index mark in the fiducial pattern. A central processor determines the position of each imaged probe tip(s) with respect to the index mark, and calculates the relative positions of each probe tip from that data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.