Substrate holding apparatus and exposure apparatus including substrate holding apparatus
US6710857B2 · kind B2 · utility
469Cited by
7References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 13, 2001 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Mar 13, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/707
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A substrate holding apparatus which holds a flat-like substrate comprises a base member and a plurality of projecting support members disposed on the base member such that the supporting members are arranged like a triangular lattice and distal end portions thereof are positioned on substantially the same plane. The substrate is to be placed on the plurality of support members.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.