Web based tool control in a semiconductor fabrication facility
US6711731B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 23, 2001 |
| Grant date | Mar 23, 2004 |
| Priority date | — |
| Expiry date | Oct 7, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04L63/02
- WIPO fieldDigital communication
- WIPO sectorElectrical engineering
Abstract
In brief, the present invention provides a system for the interconnection of semiconductor fabrication tools (“process tools”) in a semiconductor fabrication facility by use of a data network and microprocessor based interface (“browser”) associated with each process tool. The data network and microprocessor based interface provide communication in accordance with known standards via Intranet or Internet data transfer links to one or more remotely disposed browsers. Data is immediately available in real time on all aspects of the operation of the fabrication facility. Equipment engineers and process engineers can browse the various process tools from any location. Host communications to and from the tools can be monitored without affect on factory operation. The interface is compatible with standard process tools and factory automation or management software systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.