Scanning electron microscope
US6713761B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 24, 2001 |
| Grant date | Mar 30, 2004 |
| Priority date | — |
| Expiry date | Oct 20, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.