Optically powered resonant integrated microstructure magnetic field gradient sensor
US6714007B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 18, 2002 |
| Grant date | Mar 30, 2004 |
| Priority date | — |
| Expiry date | Jan 18, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/022
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device 10 for sensing a magnetic field gradient using an optically powered resonant integrated microstructure (O-RIMS). The O-RIMS comprises a microbeam 11 having a resonant frequency, a shell 16 supporting the microbeam 11, sensor electronics, a light transporter 36, such as an optical fiber or optical waveguide, in proximity to the shell 16, and a ferromagnetic or magnetically permeable element 26 attached to the shell 16. The ferromagnetic or magnetically permeable element 26 experiences a torque about the fulcrum 24 when a magnetic field gradient is present, and causes a strain on the shell 16. The strain is in turn transmitted to the microbeam 11, thereby affecting its resonant frequency. The change in resonant frequency of the microbeam 11 is conveyed to the sensor electronics via the light transporter 36.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.