Patent · US Expired

Measurement of complex surface shapes using a spherical wavefront

US6714307B2 · kind B2 · utility

51Cited by
16References
89Claims
0Family size

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Key dates

Filing dateJul 3, 2002
Grant dateMar 30, 2004
Priority date—
Expiry dateJul 3, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B2290/25
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Conical surfaces (and other complex surface shapes) can be interferometrically characterized using a locally spherical measurement wavefront (e.g., spherical and aspherical wavefronts). In particular, complex surface shapes are measured relative to a measurement point datum. This is achieved by varying the radius of curvature of a virtual surface corresponding to a theoretical test surface that would reflect a measurement wavefront to produce a constant optical path length difference (e.g., zero OPD) between the measurement and reference wavefronts.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.