Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like
US6717141B1 · kind B1 · utility
6Cited by
7References
31Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 27, 2001 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Nov 27, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/057
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In order to improve the resolution of an electron beam in a scanning electron microscope or the like in which a Wien filter is employed for particle detection purposes, the beam is caused to have an envelope with a crossover point within, and preferably centrally located with respect to, the Wien filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.