Electromagnetic energy controlled low actuation voltage microelectromechanical switch
US6717496B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2001 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Feb 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H59/0009
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention is an electromagnetic energy, e.g., visible light, controlled low actuation voltage MEMS switch. Stimulation of photovoltaic diodes causes a switching that controls the flow of a signal. A metal or other suitable conductive pad moves freely up and down within brackets, without the need for deformation, in response to the diodes to either ground a signal or permit it to pass. The low activation voltage of the bracketed pad structure permits the use of a reasonable number of photovoltaic diodes to develop sufficient voltage for actuation of the switch, allowing the realization of the present electromagnetic energy, e.g., visible light, controlled MEMS switch in a minimized chip area. The photovoltaic diodes do not require an independent DC power source to operate the switch of the invention. Use of different wavelengths to excite different sets of diodes allows turning on and off of the switch of the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.