Fast transient protection for RF plasma generator
US6718272B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2000 |
| Grant date | Apr 6, 2004 |
| Priority date | — |
| Expiry date | Apr 21, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/24
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for the detection of and recovery from a plurality of electrical transients in a plasma generator system is disclosed. The plasma generator system comprises a plasma chamber and a power amplifier is provided, wherein the apparatus comprises a sensor, the sensor detects an electrical transient in the electrical transients and outputs a first signal when the electrical transient is detected. The system also includes a first circuitry for receiving the first signal, the circuitry controlling said power output from said power amplifier in response to the first signal and outputting a second signal communicating the controlled power output, and a second circuitry for receiving the second signal, the second circuitry outputting a reset signal to the first circuitry, wherein the first circuitry receives the reset signal and resets the power output in response to the reset signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.