Patent · US Expired

Methods using dry powder deposition apparatuses

US6720024B2 · kind B2 · utility

4Cited by
45References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 27, 2002
Grant dateApr 13, 2004
Priority date
Expiry dateNov 27, 2022

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB05B5/08
  • WIPO fieldPharmaceuticals
  • WIPO sectorChemistry

Abstract

Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising:an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing;a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; andan optical detection device for quantifying the amount of grains deposited.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.