Methods using dry powder deposition apparatuses
US6720024B2 · kind B2 · utility
4Cited by
45References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2002 |
| Grant date | Apr 13, 2004 |
| Priority date | — |
| Expiry date | Nov 27, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B5/08
- WIPO fieldPharmaceuticals
- WIPO sectorChemistry
Abstract
Provided is, among other things, a dry deposition apparatus for depositing grains on a substrate comprising:an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing;a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; andan optical detection device for quantifying the amount of grains deposited.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.