Capping layer for EUV optical elements
US6724462B1 · kind B1 · utility
42Cited by
12References
38Claims
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Key dates
| Filing date | Jun 28, 2000 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Jan 9, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24355
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Optical elements such as multilayered EUV mirrors are provided with protective capping layers of diamond-like carbon (C), boron nitride (BN), boron carbide (B4C), silicon nitride (Si3N4), silicon carbide (SiC), B, Pd, Ru, Rh, Au, MgF2, LiF, C2F4 and TiN and compounds and alloys thereof. The final period of a multilayer coating may also be modified to provide improved protective characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.