Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method
US6724464B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 26, 2001 |
| Grant date | Apr 20, 2004 |
| Priority date | — |
| Expiry date | Dec 26, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T7/73
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Correlation values between a plurality of templates prepared beforehand and a picture-element data distribution as a pick-up result of an image are calculated, and the position of a maximum template whose correlation value is the maximum of the calculated correlation values is obtained. Subsequently, a curved surface function is calculated which fits the distribution of calculated correlation-values in positions near the maximum template's position, and the position of the picked-up image is calculated based on the curved surface function. As a result, the number of templates prepared beforehand to achieve desired accuracy in detecting a position and the number of times of calculating correlation-values can be reduced, and the image position can be quickly and accurately detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.