Patent · US Expired

Method and apparatus for irradiating active energy ray

US6727508B1 · kind B1 · utility

15Cited by
6References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 4, 2001
Grant dateApr 27, 2004
Priority date
Expiry dateJan 18, 2022

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB29L2007/002
  • WIPO fieldOther special machines
  • WIPO sectorMechanical engineering

Abstract

A target object to be irradiated is transported into an irradiating chamber through a transport inlet for irradiation with an active energy beam under an inert gas atmosphere in an active energy beam irradiating section included in the irradiating chamber and, then is transported out of the irradiating chamber. When the object is subject to above steps, the gas flow resistance at the transport outlet is controlled such that the active energy beam irradiation is carried out under the condition of X/Y≧1, where X represents the gas amount passing through the transport inlet, and Y represents the gas amount passing through the transport outlet.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.