Patent · US Expired

Polybenzoxazine based wafer-level underfill material

US6730542B2 · kind B2 · utility

8Cited by
3References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 10, 2003
Grant dateMay 4, 2004
Priority date
Expiry dateJan 10, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/14
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A polybenzoxazine based wafer-level underfill material. The material may be provided to a surface of a semiconductor wafer. The semiconductor wafer may then be sawed into individual chips. The polybenzoxazine based underfill material may be for use between a chip and a package substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.