Patent · US Expired

Charged particle device

US6730907B1 · kind B1 · utility

22Cited by

8References

19Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Hans-Peter Feuerbaum · Hersbruck, DE
Dieter Winkler · Munich, DE
Dror Kella · Rehovot, IL

Key dates

Filing date	Jul 16, 2002
Grant date	May 4, 2004
Priority date	—
Expiry date	Jul 16, 2022

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/0535
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention provides a charged particle device (1) comprising: a particle source (2) for providing a charged particle beam (4), and objective lens (10) for directing the particle beam onto a specimen (8), said objective lens (10) having an optical axis (6); a particle mirror (14) located on the optical axis (6) of the objective lens (10), said particle mirror having a front surface, a back surface, a drift region (26) reaching from the back surface to the front surface for letting the charged particle beam pass from the back surface to the front surface, said drift region (26) being positioned away from the optical axis (6), and a deflecting region located on the front surface for deflecting charge particles coming from the specimen towards a detector (16).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.