Apparatus for measuring capacitance of a semiconductor device

US6731129B1 · kind B1 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Wendy A. Belluomini · Austin, US
• Chandler McDowell · Austin, US
• Sani R. Nassif · Austin, US
• Ying Liu · Austin, US

Key dates

• Filing date: Dec 17, 2002
• Grant date: May 4, 2004
• Expiry date: Dec 17, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R27/2605
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for measuring capacitance of a semiconductor device is disclosed. The apparatus includes a signal source circuit, a first transistor, a second transistor, and bypass capacitor. The first transistor is connected in series with the second transistor, and the second transistor is connected in series with a device under test. The bypass capacitor connected in parallel with the first and second transistors. Coupled to the first and second transistors, the signal source circuit generates a first signal and a second signal to alternately turn on said first and second transistors such that a discharge current is generated to flow through the first and second transistors.