Confocal 3D inspection system and process
US6731383B2 · kind B2 · utility
11Cited by
24References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2001 |
| Grant date | May 4, 2004 |
| Priority date | — |
| Expiry date | Sep 12, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A confocal three dimensional inspection system, and process for use thereof, allows for inspecting of bumps and other three dimensional (3D) features on wafers and other semiconductor substrates. The sensor eliminates out of focus light using a confocal principal to improve depth response. This process and system creates multiple parallel confocal optical paths along a line. The out of focus light is eliminated by placing an aperture at a plane which is a conjugate focal plane to the surface of the sample. The result is that the sensor produces a signal only when the sample surface is in a narrow focal range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.