Patent assignee · US · COMPANY

August Technology Corp.

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16Patents
1Active
16Granted
34Portfolio score

Filing activity: Jul 20, 1994 → Jul 14, 2004 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6324298A Automated wafer defect inspection system and a process of performing such inspection Electricity 186 Expired
US5580163A Focusing light source with flexible mount for multiple light-emitting elements Emerging Cross-Sectional Technologies 89 Expired
US6937753B1 Automated wafer defect inspection system and a process of performing such inspection Electricity 55 Expired
US6826298B1 Automated wafer defect inspection system and a process of performing such inspection Electricity 21 Expired
US8045788B2 Product setup sharing for multiple inspection systems Emerging Cross-Sectional Technologies 17 Active
US6947588B2 Edge normal process Physics 15 Expired
US6731383B2 Confocal 3D inspection system and process Physics 11 Expired
US6773935B2 Confocal 3D inspection system and process Physics 10 Expired
US7024031B1 System and method for inspection using off-angle lighting Physics 9 Expired
US7019841B2 System and method for inspecting a component using interferometry Physics 8 Expired
US6870609B2 Confocal 3D inspection system and process Physics 7 Expired
US6820349B2 End effector alignment tool for substrate handling system Electricity 7 Expired
US6970287B1 Confocal 3D inspection system and process Physics 6 Expired
US6882415B1 Confocal 3D inspection system and process Physics 5 Expired
US7046837B2 System and method for locating irregular edges in image data Physics 4 Expired
US7111095B2 Data transfer device with data frame grabber with switched fabric interface wherein data is distributed across network over virtual lane Physics 1 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.