Patent · US Expired

Microrelay

US6734770B2 · kind B2 · utility

46Cited by

9References

11Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Robert Aigner · Winter Garden, US
Sven Michaelis · Birkenfeld, DE
Florian Plötz · Regensburg, DE

Key dates

Filing date	Aug 2, 2002
Grant date	May 11, 2004
Priority date	—
Expiry date	Aug 2, 2022

Classification

Technology area (CPC H)Electricity
CPC primaryH01H2059/0054
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A microrelay has a switching part which is pivotably suspended on a substrate and can be moved into two alternative switching states like a rocker, by electrostatic attraction through the use of suitably attached electrodes. The switching function is brought about by electrodes which are fastened to the substrate above the rocker being shorted by metallizations or contact electrodes on an upper side of the switching part.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.