Patent · US Expired

Vacuum measurement device

US6734969B2 · kind B2 · utility

0Cited by

5References

18Claims

0Family size

Assignee

Nanophotonics Co., Ltd. · DE

Inventors

Michael Abraham · Mainz, DE
Matthias Hampel · Rüsselsheim am Main, DE

Key dates

Filing date	Aug 27, 2001
Grant date	May 11, 2004
Priority date	—
Expiry date	Apr 15, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/8422
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

To carry out measurements in the vacuum, for example for quality control in the production of semiconductors, conventional stand alone measuring machines are installed. They are very cost, space and time intensive. To enable a process oriented measurement under optimal conditions, a device with a two part case is proposed that can be moved in a vacuum chamber, whereby one part of the case projects into the vacuum chamber and the other part of the case is located outside the vacuum chamber. The case can receive a measurement system. In addition, an adjusting device, engaging with the case, and a counterpull device, engaging with the second part of the case, are provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.