Chirp compensation method and apparatus

US6735225B2 · kind B2 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Hans-Stephan Albrecht · Göttingen, DE
• Matthias Kramer · Bottrop, DE
• Marcus Serwazi · Gleichen, DE
• Thomas Schroeder · Oettingen, DE
• Stefan Niedermeier · Bad Griesbach im Rottal, DE

Key dates

• Filing date: Jun 6, 2002
• Grant date: May 11, 2004
• Expiry date: Jun 6, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/1062
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A wavelength chirp compensation method for an excimer or molecular fluorine laser system operating in burst mode, includes pre-programming into a computer of the laser system resonator tuning optic adjustments for making the adjustments during pauses between bursts to compensate wavelength chirp at beginnings of succeeding bursts.