Laser with versatile output energy
US6735232B2 · kind B2 · utility
3Cited by
85References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2001 |
| Grant date | May 11, 2004 |
| Priority date | — |
| Expiry date | Apr 4, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2251
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of operating a laser system for increasing the lifetimes of optical components of the resonator includes the steps of configuring the laser system to initially output laser pulses at an energy in a range above a predetermined energy for industrial lithographic processing, and attenuating the energy of the output pulses to the predetermined energy. A further step includes reducing an amount of attenuation as optics of the laser resonator age to maintain the laser pulses at the predetermined energy, or reducing the amount of attenuation to produce pulses having a higher energy than the predetermined energy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.