Diaphragm valve with dynamic metal seat and coned disk springs
US6736370B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2002 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Dec 20, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0076
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The disclosure pertains to a compact integrated fluid control valve useful in controlling process fluids handled as part of a semiconductor processing operation. In the wetted section of the valve, process fluids enter through one or more entrance ports and exit through an annular metallic valve seat. In the valve's drive section, a sliding cylinder, including an upper horizontal member tied to a lower horizontal member, moves up and down. The lower horizontal member presses a diaphragm against the valve seat to close the valve, and moves away from the valve seat to permit fluid flow through the valve. A spring presses at the top of the upper horizontal member of the sliding cylinder, while a controlled pneumatic pressure is applied at the bottom of the upper horizontal member. The balance between the force of the spring and the force of the pneumatic pressure determines the extent to which the valve is open.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.