Method for manufacturing semiconductor device, semiconductor manufacturing apparatus, and method for controlling transfer in production line
US6738681B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 6, 2003 |
| Grant date | May 18, 2004 |
| Priority date | — |
| Expiry date | Feb 6, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/80
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Shortening TAT for processing express lots without reducing the utilization rate of manufacturing apparatuses for semiconductor device. When the number of vacant ports LPOT of a manufacturing apparatus EQ3 used in a next step is only one at the of time of completing a process for a normal lot LA by a manufacturing apparatus EQ1 and when there is a possibility that processes for an express lot LB performed by a manufacturing apparatus EQ2 will be completed before a remaining processing time period for a lot LC performed by the manufacturing apparatus EQ3 reaches a predetermined set value, the lot LA is transferred to a lot stocker LS for securing a vacant port LPOT and as soon as the processes for the express lot LB performed by the manufacturing apparatus EQ2 are completed, the express lot LB is transferred to the vacant port LPOT in the manufacturing apparatus EQ3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.