Method for the calibration of a wire bonder

US6739496B2 · kind B2 · utility

Assignee

• ESEC, Trading SA · CH

Inventors

• Michael Mayer · Stuttgart, DE
• Martin Melzer · Karlsruhe, DE

Key dates

• Filing date: Feb 3, 2003
• Grant date: May 25, 2004
• Expiry date: Feb 3, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/01082
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

In order that, on wire bonding by means of a Wire Bonder, optimum bonding results can be achieved after a capillary change it is suggested that, after a change from a first capillary to a second capillary, the ultrasonic transducer which applies ultrasonics to the horn which guides the capillary is controlled with a parameter P2 which results from the parameter P1 before the capillary change as P2=g(k1, k2)*P1 or P2=g(k1, k2, A1, A2)*P1 or P2=g(k1, k2, A1, A2, H1, H2)*P1, whereby the quantities k1 and k2 designate the estimated values for the flexural strength, the quantities A1 and A2 the amplitudes of the freely oscillating capillary and H1 and H2 the diameters in the narrowest part of the longitudinal drill hole of the first or second capillary and whereby the function g is a predetermined function.