DLC coating system and process and apparatus for making coating system
US6740393B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2000 |
| Grant date | May 25, 2004 |
| Priority date | — |
| Expiry date | Apr 18, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process and an arrangement are described by means of which it is possible to generate a layer system for the protection against wear, for the protection against corrosion and for improving the sliding properties or the like, which has an adhesive layer for the arrangement on a substrate, a transition layer for the arrangement on the adhesive layer and a cover layer of an adamantine carbon, the adhesive layer comprising at least one element from the Group which contains the elements of the 4th, 5th and 6th Subgroup and silicon, the transition layer comprising carbon and at least one element from the above-mentioned Group, and the cover layer consisting essentially adamantine carbon, the layer system having a hardness of at last 15 GPa, preferably at least 20 GPa, and an adhesion of at least 3 HF according to VDI 3824, Page 4.For producing such a layer, a process is used during which, after the substrate is placed in a vacuum chamber and after a pumping-down to a vacuum of less than 10−4 mbar, preferably 10−5, the substrate surface is first cleaned in that adhering impurities are removed, while subsequently a plasma-aided vapor depositing of the adhesive layer takes pla…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.