Electron beam apparatus
US6740888B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 2003 |
| Grant date | May 25, 2004 |
| Priority date | — |
| Expiry date | May 14, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In order to ensure that an electromagnetic field lens is capable of high-resolution observation using a magnetic field lens without leakage of magnetic flux, there is provided a magnetic field superimposing-type lens 1 for focusing an electron beam onto a sample 3 so as to irradiate the sample 3 is provided with an upper magnetic pole 213 a long way from the sample 3 and a lower side magnetic pole 214 close to the sample 3, with electrical insulation being provided between the upper magnetic pole 213 and the lower magnetic pole 214 by a ferrite insulator 215 provided between the upper magnetic pole 213 and the lower magnetic pole 214 in an integral manner with the magnetic poles so that the upper magnetic pole 213 and the lower magnetic pole 214 may be held at different potentials. There is therefore no leak in flux from between the upper magnetic pole 213 and the lower-magnetic pole 214, the chromatic aberration coefficient Cc can be made small, and high-resolution observation of the sample can be achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.