Patent · US Expired

Semiconductor device having capacitors provided with protective insulating film

US6740974B2 · kind B2 · utility

16Cited by
3References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 24, 2002
Grant dateMay 25, 2004
Priority date
Expiry dateJun 24, 2022

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a first electrode film, first and second electrode films, first and second connection parts, first and second wirings, and a protective insulating film. The second electrode film opposes the first electrode film. The capacitor insulating film is provided between the first electrode film and the second electrode film. The first and second connection parts are electrically connected to the first and second electrode films, respectively. The first wiring is electrically connected to the first electrode film by the first connection part. The second wiring is electrically connected to the second electrode film by the second connection part. The protective insulating film is provided between the capacitor insulating film and the second electrode film or on the second electrode film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.