Pellicle
US6744562B2 · kind B2 · utility
5Cited by
3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2002 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Dec 13, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/64
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pellicle comprising a box-shaped pellicle frame having top and bottom openings, and a pellicle sheet bonded to the pellicle frame to cover one of the openings of the pellicle frame, wherein the pellicle frame is made of quartz glass, a plurality of vent holes are formed as distributed on opposing side walls of the pellicle frame, and the size of the vent holes in the direction of the height of the pellicle frame is at most ⅗ of the height of the pellicle frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.