Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates

US6746825B2 · kind B2 · utility

Assignee

• Wisconsin Alumni Research Foundation · US

Inventors

• Paul Franklin Nealey · Madison, US
• Juan DePablo · Madison, US
• Francesco Cerrina · Madison, US
• Harun Solak · Brugg, CH
• XiaoMin Yang · Livermore, US
• Richard D. Peters · Westfield, US
• Qiang Wang · Karlsruhe, DE

Key dates

• Filing date: Oct 5, 2001
• Grant date: Jun 8, 2004
• Expiry date: Oct 5, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/2995
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Copolymer structures are formed by exposing a substrate with an imaging layer thereon to two or more beams of selected wavelengths to form interference patterns at the imaging layer to change the wettability of the imaging layer in accordance with the interference patterns. A layer of a selected block copolymer is deposited onto the exposed imaging layer and annealed to separate the components of the copolymer in accordance with the pattern of wettability and to replicate the pattern of the imaging layer in the copolymer layer. Stripes or isolated regions of the separated components may be formed with periodic dimensions in the range of 100 nm or less.